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An AFM study on SIMS crater bottom
An AFM study on SIMS crater bottom. INTRODUCTION. Due to the sensitivity, the good depth resolution and the great interest in ultra shallow ...
fcs.itc.it/MAME/download/AFM%20on%20SIMS%20crater%...
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Atomic Force Microscopy Study of Conformal Sputtering in Strained ...
craters in each of the samples. It is known that the roughness of the SIMS crater bottom may increase as a function of depth. Impact energy, impact angle ...
www.mrs.org/s_mrs/bin.asp?CID=2656&DID=66907&DOC=F...
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KLA Tencor | Corporate Releases | KLA-Tencor and Seiko ...
KLA-Tencor offers the industry's widest range of best-of-breed inspection and ... large structures, such as secondary ion mass spectrometry (SIMS) craters. ...
www.kla-tencor.com/corporate-releases/kla-tencor-a...
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Transient effects induced through ripple topography growth during ...
The analyzed area was fixed to a circular area of 400 μm in diameter centered in the middle of the SIMS craters (these were located via previously applied ...
linkinghub.elsevier.com/retrieve/pii/S016943320200...
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High Depth Resolution SIMS of Strained Si in Si/SiGe
Subsequently, AFM was used to profile the SIMS craters and shows that the surface topography was maintained throughout the sputtering process (Figures 2 and ...
www.eaglabs.com/files/appnotes/AN408.pdf
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Measurements of Ti-Containing Barrier Materials and Low-K ...
SIMS Craters Obtained in Low-K Materials While. Exposed to 9keV and 10eV Electron Bombardments ... m deep SIMS craters: (a), (b) 3keV O. 2. primary beam and ...
www.eaglabs.com/files/posters/PS706.pdf
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Back side SIMS analysis of hafnium silicate - Elsevier
2 is a grey scale representation of the red filter image of the back side polished sample showing height contours and several SIMS craters. ...
linkinghub.elsevier.com/retrieve/pii/S016943320600...
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IDE database - Literature Simon et al., LDEF 1 1992
... one of the impacts analyzed with SIMS had craters
setas-www.larc.nasa.gov/LDEF/MET_DEB/IDE/REFERENC/...
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Atomic force microscopy investigation of polysilicon films before ...
annealed state before SIMS analysis and from the SIMS craters of both samples. All of the. scans were recorded as 256 × 256 pixel images over identical (4 ...
www.iop.org/EJ/article/0953-8984/10/8/006/c80801.p...
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Improvements in SIMS continue Is the end in sight?
large enough to encompass typical SIMS craters. 3.2. The special properties of cluster SIMS ... The formation of craters on the. mesoscopic scale from the ...
nxw.chem.psu.edu/nxw/pdf/336.pdf
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Applications of a Novel FIB-SIMS Instrument in SIMS Image Depth ...
SIMS craters from the analysis areas are shown. The well defined crater walls in the Ga. + crater aid in reducing side wall effects during the profile. In ...
journals.cambridge.org/production/action/cjoGetFul...
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Publications - (1977- )
SIMS-IV meeting at Osaka, Japan) ... Studies of Primary Beam Damage at the Bottom of SIMS Craters Eroded in Si. ... SIMS VI, John Wiley & Sons(1988) ...
personal.ee.surrey.ac.uk/Personal/R.Webb/publicati...
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Annual Workshop on SIMS
Tentative Program, 13th Annual Workshop on SIMS, April 30 - May 3, 2000 ... Evaluation of Optical Profilometry for Measurement of Ultra Shallow SIMS Craters ...
www.simsworkshop.org/annualworkshops/workshop00/pr...
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Angle-dependent SIMS artifact in the analysis of InP/InGaAs layers
The changes in the surface composition of the SIMS crater bottom during the development of the ripple topography were also investigated with AES (Auger ...
www.springerlink.com/index/T26502772631473U.pdf
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SIMS XI - Technical Program Overview
Remote SIMS Operation using the Internet - Michael Wiedenbeck (University of New Mexico) Precision Depth Measurement of Ultrashallow SIMS Craters Using a ...
www.simsworkshop.org/annualworkshops/workshop98/pr...
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Comparative models for diffusion of implanted beryllium in gallium
The SIMS as-implanted depth profiles have been used as the initial Be concentration distributions in our simulations [5, 6, 15]. In all models, we assumed a detailed balance between the...
www.iop.org/EJ/S/UNREG/MnFbXIaSvHHHUYJ6RF0UjQ/arti...
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Measurements of Ti-Containing Barrier Materials and Low-k ...
Secondary Ion Mass Spectrometry (SIMS) is one ... the IC because SIMS provides nanometer depth ... m deep SIMS craters: (a), (b) 3keV O. 2. primary beam and ...
files.shareholder.com/downloads/NVLS/0x0x177793/C0...
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Secondary ion mass spectrometry induced damage adjacent to ...
PTEM images showed the presence of interstitial defects near the original SIMS crater, and SIMS depth profiles of similar regions exhibited boron ...
cat.inist.fr/?aModele=afficheN&cpsidt=13921580
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